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COURSE PRO FORMA

IMPORTANT:

Contents of this Pro Forma shall not be changed without the Senate’s approval for items indicated with *. Changes
to the other items can be approved at the Academy/Faculty/Institution/Centre level.
Academy/Faculty/Centre Engineering

Department Mechanical Engineering
Programme Materials Engineering
Course Code* KMEB 4352

Course Title* Materials and Processes in Semiconductor Manufacturing

Course Pre-requisite(s)/ Minimum Require- None
ment(s)

Student Learning Time (SLT)* 120 h

Credit* 3
Course Learning Outcomes* At the end of the course, students are able to:
1. Explain the process sequence in semiconductor manufacturing and the
importance of semiconductor industry in global and Malaysian economy
2. Analyze the fundamental principles underlying different semiconductor
manufacturing processes
3. Assess the suitability of different materials and processes for various
steps in integrated circuit (IC) fabrication and packaging

Transferable Skills None
Synopsis of Course Contents Introduction to semiconductor industry and its importance in global and Ma-
laysian economy. Overview of semiconductor devices and overall semicon-
ductor manufacturing processes. Crystal growth processes and wafer prep-
aration, lithographic techniques and materials, oxidation and thermal pro-
cesses, ion implantation, wet and plasma etching, thin film deposition and
metallization, chemical mechanical polishing. Testing and packaging. Clean
room basics and protocol.

Learning Strategies (lecture, tutorial, work- Lecture, tutorial, active learning, cooperative learning
shop, discussion, etc)

Assessment Weightage* Continuous assessment : 40%
Final examination: 60%

Methodologies for Feedback on Perfor- 1. Announcement of marks for assignments and continuous assessment
mance before the final examination.
2. Grades for final exam will be given.

Criteria in Summative Assessment
Refer to the University of Malaya (First Degree) Rules 2013 and the Uni-
versity of Malaya (First Degree) Regulations 2013.
UM-PT01-PK03-BR003(BI)-S04