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COURSE INFORMATION FOR CURRENT SEMESTER/TERM

Academic Year 2015/2016
Semester/Term 1
Course Code KMEB 4352

Course Title Materials and Processes in Semiconductor Manufacturing

Credit 3

Medium of Instruction English

Course Pre-requisite(s)/ Minimum Require- None
ment(s)

Main Reference 1. Introduction to Semiconductor Manufacturing Technology, Hong Xiao,
Prentice Hall, International Edition, 2012.
2. Fundamentals of Semiconductor Manufacturing and Process Control,
Gary S. May and Costas J. Spanos, Wiley-IEEE Press, 2006.
3. Semiconductor Manufacturing Technology, Michael Quirk and Julian
Serda, Prentice Hall, 2000.
4. VLSI Technology (Principles and Applications in Engineering), Wai-Kai

Teaching Materials/ Equipment References, notes, multimedia
Learning Strategies Lecture, tutorial

Student Learning Time Face to Face: 42 h
Guided Learning: 16 h
Independent Learning: 57 h
Assessment: 5 h

Soft Skills Communication skill (CS1-CS5)
Lifelong learning skill (LL1-LL2)
Lecturer Prof. Dr. A.S.M.A. Haseeb

Room Room 513, Level 5, Engineering Tower

Telephone/e-mail 03-7967 4492 / haseeb@um.edu.my

Lecture Session:
Day/Time
Venue Refer to lecture timetable

Tutorial/Practical Session: Day/Time
Venue
Important Dates Test :
(e.g: test, final examination, quiz etc.) Examination : Refer examination timetable

UM-PT01-PK03-BR004(BI)-S04