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COURSE INFORMATION FOR CURRENT SEMESTER/TERM

Teaching Schedule

References/Teaching Mate-
Week Lecture/Tutorial/Assignment Topic
rials/Equipment
1. Introduction to semiconductor industry and its importance in the Lecture notes, Reference
global and Malaysian economy texts

2. Overview of semiconductor devices and overall semiconductor Lecture notes, Reference
manufacturing processes texts

3. Crystal growth processes and wafer preparation Lecture notes, Reference
texts

4. Lithographic techniques and materials Lecture notes, Reference
texts

5. Oxidation, diffusion and ion implantation Lecture notes, Reference
texts

6. Oxidation, diffusion and ion implantation Lecture notes, Reference
texts

7. Wet and plasma etching Lecture notes, Reference
texts

8. Thin film deposition and metallization Lecture notes, Reference
texts

9. Thin film deposition and metallization Lecture notes, Reference
texts
10. Thin film deposition and metallization Lecture notes, Reference
texts
11. Chemical mechanical polishing Lecture notes, Reference
texts
12. Testing and packaging Lecture notes, Reference
texts
13. Testing and packaging Lecture notes, Reference
texts
14. Clean room basics and protocol. Lecture notes, Reference
texts

UM-PT01-PK03-BR004(BI)-S04